| 发明名称 |
ULTRASCHNELLER ELEKTRO-DYNAMISCHER X, Y UND THETA POSITIONIERUNGSTISCH. |
| 摘要 |
The invention discloses an Ultrafast Electro-Dynamic X, Y and Theta Positioning Stage. A positioning stage made according to this invention allows light payloads to be moved with extremely high linear and angular accelerations over finite distances and angles with a plane. An important feature of this invention is a momentum-cancelling design which allows reaction forces and torques on the fixed member to approach zero, thereby, allowing for a smooth and an ultrafast performance by the positioning stage. |
| 申请公布号 |
DE69010218(D1) |
申请公布日期 |
1994.07.28 |
| 申请号 |
DE1990610218 |
申请日期 |
1990.09.28 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US |
发明人 |
HOLLIS, RALPH, L., JR., YORKTOWN HEIGHTS, NY 10598, US |
| 分类号 |
B23Q1/00;B23Q1/26;B23Q1/38;B23Q1/48;B23Q5/28;B23Q11/00;B23Q16/00;G01Q10/04;G03F7/20;G05B1/06;H01L21/30;H01L21/67;H01L21/68;H02K41/02;H02K41/035;(IPC1-7):B23Q11/00;B23Q15/02 |
主分类号 |
B23Q1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
