| 摘要 |
PURPOSE:To facilitate fetching of capacitive signal occurring between a supporting beam and each fixed part while downsizing the entire structure. CONSTITUTION:Each fixing part 16 and a supporting beam 14 made of a low resistance silicon material are formed integrally on the upper side of a lower substrate 11 made of a high resistance silicon material, while bonding layers 17, 17,... located on the underside of each fixing part 16 and the supporting beam 14 and lead parts 19, 19,... having one ends connected with each bonding layer 17 and the other end connected with each electrode 20 for external connection are provided on the upper side of the lower substrate 11. This constitution allows fetching of capacitive signal variable with acceleration from between the supporting beam 14 and each fixing part 16 through each bonding layer 17 and each lead part 19. |
