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发明名称
SUBSTRATE WASHING DEVICE
摘要
申请公布号
JPH06208098(A)
申请公布日期
1994.07.26
申请号
JP19930233790
申请日期
1993.09.20
申请人
SHIBAURA ENG WORKS CO LTD
发明人
HIROSE HARUMICHI;SATO HITOSHI;KIMURA CHOICHI
分类号
B08B3/02;B08B3/10;G02F1/13;G02F1/1333;H05K3/26;(IPC1-7):G02F1/13
主分类号
B08B3/02
代理机构
代理人
主权项
地址
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