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发明名称
WET ETCHING METHOD
摘要
申请公布号
JPH06208987(A)
申请公布日期
1994.07.26
申请号
JP19930003000
申请日期
1993.01.12
申请人
NEC KAGOSHIMA LTD
发明人
KIDO SHUSAKU
分类号
H01L21/28;C23F1/00;H01L21/306;(IPC1-7):H01L21/306
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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