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经营范围
发明名称
HEAT TREATMENT EQUIPMENT
摘要
申请公布号
JPH06208954(A)
申请公布日期
1994.07.26
申请号
JP19930280086
申请日期
1993.10.13
申请人
TOKYO ELECTRON TOHOKU LTD
发明人
MIYAGI KATSUNOBU;YAMAHARA YOSHIYUKI
分类号
H01L21/205;H01L21/22;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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