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发明名称
PLASMA GENERATOR
摘要
申请公布号
JPH06204178(A)
申请公布日期
1994.07.22
申请号
JP19930001146
申请日期
1993.01.07
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KUBOTA MASABUMI;FUKUTO KENJI;TAMAOKI NORIHIKO;OKUNI MITSUHIRO;NOMURA NOBORU;NAKAYAMA ICHIRO
分类号
H01L21/30;H01L21/027;H01L21/302;H01L21/31;H05H1/46;(IPC1-7):H01L21/302
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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