| 摘要 |
PURPOSE:To prevent deterioration of magnetic seal of a rotary introduction machine when high heat is applied to a rotary shaft, by installing the rotary induction machine constituted of magnetic fluid seal on the lid of a treatment vessel containing an object to be treated, and circulating refrigerant in a rotary shaft of the rotary induction machine. CONSTITUTION:Circumferential trenches 26a are formed between O rings 23. A cooling water exhaust vent 26 which discharges refrigerant into the trench 26a is formed on the side surface of a rotary introduction machine 17. A rotary shaft 18 is provided with a cooling water circulation route 27 which links a horizontal hole 27a for taking in cooling water supplied to the circumferential trench from a cooling water introducing port 25 with a horizontal hole 27b which circulates the cooling water and discharges it in the circumferential trench with which the cooling water exhaust vent 26 links. The cooling water circulation route 27 effectively absorbs the heat traveling the rotary shaft 18. Hence the inside of the rotary shaft 18, at least a magnetic seal 20 part, is cooled along the shaft.
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