Zerstäubungsanlage mit rotierender Magnetanordnung, deren Geometrie ein vorgegebenes Targetabtragprofil erzeugt.,申请号DE19906007538T-传众专利搜索

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发明名称	Zerstäubungsanlage mit rotierender Magnetanordnung, deren Geometrie ein vorgegebenes Targetabtragprofil erzeugt.
摘要
申请公布号	DE69007538(T2)	申请公布日期	1994.07.21
申请号	DE19906007538T	申请日期	1990.05.14
申请人	VARIAN ASSOCIATES, INC., PALO ALTO, CALIF.	发明人	ANDERSON, ROBERT L., PALO ALTO, CALIFORNIA 94306;HELMER, JOHN C., PALO ALTO, CALIFORNIA 94025
分类号	C23C14/35;H01J37/34;(IPC1-7):C23C14/35	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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