摘要 |
<p>PURPOSE: To enable to confine an article under a special atmosphere throughout transport or storage by providing air block that disperses a special atmosphere including vacuum around the article in a body. CONSTITUTION: A box consists of a body 2 housing an article 1, and the body 2 is provided with a door 10 to close the body 2 over the full length of the side face 3. The door 10 is shut or opened with operating lever 11 pivotally mounted around a spindle 12 disposed as traversing the door 10 through a lever 13. An air block 20 is also provided over the full length of a side face 4. The air block 20 distributes flow of air, gas or a special atmosphere in inner space of the body 2 so that a silicon wafer 1 may be enclosed with the flow. For this purpose, the air block 20 possesses an air inlet 21 for supplying a special atmosphere thereinto. The special atmosphere is ultra-clean air or nitrogen.</p> |