发明名称 BOX FOR HOUSING FALT ARTICLE
摘要 <p>PURPOSE: To enable to confine an article under a special atmosphere throughout transport or storage by providing air block that disperses a special atmosphere including vacuum around the article in a body. CONSTITUTION: A box consists of a body 2 housing an article 1, and the body 2 is provided with a door 10 to close the body 2 over the full length of the side face 3. The door 10 is shut or opened with operating lever 11 pivotally mounted around a spindle 12 disposed as traversing the door 10 through a lever 13. An air block 20 is also provided over the full length of a side face 4. The air block 20 distributes flow of air, gas or a special atmosphere in inner space of the body 2 so that a silicon wafer 1 may be enclosed with the flow. For this purpose, the air block 20 possesses an air inlet 21 for supplying a special atmosphere thereinto. The special atmosphere is ultra-clean air or nitrogen.</p>
申请公布号 JPH06199379(A) 申请公布日期 1994.07.19
申请号 JP19930258659 申请日期 1993.10.15
申请人 COMMISS ENERG ATOM 发明人 KUROODO DOSHIE
分类号 B65D85/00;B65D85/86;H01L21/673;(IPC1-7):B65D85/00;H01L21/68;B65D85/38 主分类号 B65D85/00
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