FLOW RATE CONTROLLER,申请号JP19920357987-传众专利搜索

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发明名称	FLOW RATE CONTROLLER
摘要
申请公布号	JPH06193761(A)	申请公布日期	1994.07.15
申请号	JP19920357987	申请日期	1992.12.25
申请人	TOKYO ELECTRON LTD	发明人	MATSUO TAKENOBU;WAKABAYASHI TAKESHI;MORIYA SHUJI
分类号	F16K31/04;G05D7/06;(IPC1-7):F16K31/04	主分类号	F16K31/04
代理机构		代理人
主权项
地址

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