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发明名称
MASTER-SLICE TYPE SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND IT MANUFACTURE
摘要
申请公布号
JPH06196669(A)
申请公布日期
1994.07.15
申请号
JP19920346451
申请日期
1992.12.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
HAYAKAWA YASUSHI
分类号
H01L21/82;H01L27/118;(IPC1-7):H01L27/118
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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