OPTICAL WAVEGUIDE AND METHOD OF FABRICATING THE SAME

摘要

In the method for forming an optical waveguide according to this invention, an optical waveguide comprising a core of quartz as a main component, and a cladding layers surrounding the core is formed by deposition of glass fine particles by flame hydrolysis deposition and vitrifying the glass fine particle layers. This method includes a step of transiently increasing a feed amount of phosphorus to a flame burner in forming glass fine particle layers to be the cladding layers. Feeding phosphorus in this step for the first time after a glass fine particle layer is deposited without feeding phosphorus to the flame burner, whereby generation of foreign objects near the core can be suppressed. The method for fabricating an optical waveguide according to this invention is for fabricating a core 132a or cladding layers 122 142 surrounding the core 132a by flame hydrolysis deposition and is characterized in that the glass fine particle layers are vitrified after the deposition of the phosphorus-content glass fine particle layer, whereby glass films 122a, 122b with a thickness of below 10 .mu.m are formed. This glass film forming step is repeated twice or more times to form the core or the glass layers to be the cladding layers surrounding the core. This invention can suppress inhomogeneous vitrified films and especially can make phosphorus concentrations in the cladding layers uniform. As a result, prapagation losses can be made small.