发明名称 Ein Halbleitersubstrat mit einem supraleitenden Dünnfilm.
摘要 A semiconductor substrate comprising an oxide substrate such as MgO or SrTiO3, a superconducting thin film layer composed of compound oxide such as Ln1Ba2Cu3O7- delta (Ln is lanthanide) and deposited on said oxide substrate, and a semiconductor layer composed of compound semiconductor material such as GaAs and deposited on said superconducting thin film layer.
申请公布号 DE3850084(D1) 申请公布日期 1994.07.14
申请号 DE19883850084 申请日期 1988.12.26
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD., OSAKA 发明人 ITOZAKI, HIDEO ITAMI WORKS OF SUMITOMO, ITAMI-SHI HYOGO;HARADA, KEIZO ITAMI WORKS OF SUMITOMO, ITAMI-SHI HYOGO;FUJIMORI, NAOJI ITAMI WORKS OF SUMITOMO, ITAMI-SHI HYOGO;YAZU, SHUJI ITAMI WORKS OF SUMITOMO, ITAMI-SHI HYOGO;JODAI, TETSUJI ITAMI WORKS OF SUMITOMO, ITAMI-SHI HYOGO
分类号 H01L21/20;H01L21/3205;H01L21/36;H01L21/768;H01L23/532;H01L39/12;H01L39/14;H01L39/24 主分类号 H01L21/20
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