申请人 |
HITACHI CHEMICAL CO., LTD., TOKIO/TOKYO;HITACHI, LTD., TOKIO/TOKYO |
发明人 |
TAI, SEIJI, PALO ALTO CALIFORNIA 94306;HAYASHI, NOBUYUKI, HITACHI-SHI;KAMIJIMA, KOICHI, HITACHI-SHI;KATAYOSE, MITSUO, HITACHI-SHI;AKIMOTO, TAKAYUKI, HITACHI-SHI;HAYASHIDA, SHIGERU, HITACHI-SHI;HAGIWARA, HIDEO, HITACHI-SHI;ERA, SUSUMU, ICHIHARA-SHI;KOBAYASHI, SETSUO, HITACHI-SHI;MUKOH, AKIO, MITO-SHI |