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发明名称
VAPOR BROWTH DEVICE
摘要
申请公布号
JPH06188195(A)
申请公布日期
1994.07.08
申请号
JP19920336230
申请日期
1992.12.16
申请人
SUMITOMO CHEM CO LTD
发明人
HATA MASAHIKO;FUKUHARA NOBORU;TAKADA HIROAKI
分类号
H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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