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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06188258(A)
申请公布日期
1994.07.08
申请号
JP19920337614
申请日期
1992.12.17
申请人
KAWASAKI STEEL CORP
发明人
TAKAHASHI KATSUYUKI
分类号
H01L21/336;H01L29/78;(IPC1-7):H01L21/336;H01L29/784
主分类号
H01L21/336
代理机构
代理人
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地址
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