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发明名称
Alkalifreies Glas mit niedriger Wärmedehnung für Photomasken und optische Elemente
摘要
申请公布号
DE3516020(C2)
申请公布日期
1994.07.07
申请号
DE19853516020
申请日期
1985.05.04
申请人
SCHOTT GLASS TECHNOLOGIES INC., DURYEA, PA.
发明人
FRANKLIN, BRAIN, KINGSTON, PA.;MADER, KARL-HEINZ, 3223 DELLIGSEN
分类号
C03C3/00;C03C3/093;C03C3/095;C03C4/00;G03F1/00;G03F1/14;H01L21/316;(IPC1-7):C03C3/093;H01L21/32
主分类号
C03C3/00
代理机构
代理人
主权项
地址
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