发明名称 Wire bonding apparatus.
摘要 In the first operating unit (33), the bonding gap and the loop length of the bonding wire are calculated from the first and second bonding points (2,7). In the second operating unit (34), the length (h) of the oblique line of the bonding wire, and the angle ( theta ) made between the oblique line and a line connecting the inner lead and the bed together are calculated from the bonding gap, the loop length, and the loop height (RL). In the automatic operating unit (35), the reverse height, i.e. the distance by which the capillary (37) is moved upward from the bonding pad position, the reverse amount (R), i.e. the distance by which the capillary (37), already ascended to the reverse height, is moved to the opposite side of the bonding position, and the capillary ascending amount (Z), i.e. the distance by which the capillary (37), already moved by the reverse amount, is moved to the highest position of the capillary (37) from the upper surface of the semiconductor chip are calculated from the length of the oblique line, the angle, and the loop height. <IMAGE> <IMAGE>
申请公布号 EP0604782(A1) 申请公布日期 1994.07.06
申请号 EP19930119534 申请日期 1993.12.03
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 NAKAO, MITSUHIRO, C/O INT.P.D., K.K. TOSHIBA
分类号 H01L21/60;B23K20/00;H01L21/00 主分类号 H01L21/60
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