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发明名称
SEIDENCHATSUKU
摘要
申请公布号
JPH0652758(B2)
申请公布日期
1994.07.06
申请号
JP19870026319
申请日期
1987.02.09
申请人
NIPPON TELEGRAPH & TELEPHONE
发明人
KANAI MUNENORI;MATSUO SEITARO;ISHIHARA SUNAO;KINOSHITA HIROO
分类号
H01L21/683;B23Q3/15;H01L21/68;H02N13/00
主分类号
H01L21/683
代理机构
代理人
主权项
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