| 摘要 |
PURPOSE:To provide an industrially usable method for producing an ultrahigh purity beta-silicon carbide powder having <=1ppm concn. each of impurities. CONSTITUTION:A liq. silicon compd. and a liq. org. compd. which forms carbon by heating, e.g. a phenolic resin are used as starting materials, a polymn. or crosslinking catalyst is added and the starting materials are brought into a polymn. or crosslinking reaction. The resulting precursor is carbonized by heating in a nonoxidizing atmosphere and further fired at a high temp. in a nonoxidizing atmosphere to produce beta-silicon carbide powder. In this method, a halogen compd. not practically contg. a metallic component, e.g. hydrogen chloride is added to the starting materials and/or the catalyst and a high purity carbonaceous solid and a high purity siliceous solid are further added to the starting materials. |
