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发明名称
METHOD OF EXTRACTING GROWTH CLUSTERS IN MONOCRYSTAL SILICON
摘要
申请公布号
RU1083848(C)
申请公布日期
1994.06.30
申请号
SU19823494348
申请日期
1982.09.29
申请人
SMULSKIJ A.S.;ITALYANTSEV A.G.;MORDKOVICH V.N.;INOZEMTSEV S.A.;KUZNETSOV YU.A.;MILVIDSKIJ M.G.
发明人
SMULSKIJ A.S.;ITALYANTSEV A.G.;MORDKOVICH V.N.;INOZEMTSEV S.A.;KUZNETSOV YU.A.;MILVIDSKIJ M.G.
分类号
H01L21/322;(IPC1-7):H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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