发明名称 Variable conductivity power MOSFET
摘要 The MOSFET includes a semiconductor (p+Si) substrate (10) and several (p+) protective ring layers to guarantee a high withstanding voltage. A deep (p ) layer (16) is formed and serves as part of the base-diffusion layer (22) in which a flat (p+) layer (24) is produced, and the base-diffusion layer (22) is used as a mask to generate the gate-electrode (20). The (n+) source diffusion layer (26) is also used as a mask in forming the gate-electrode (20), which is produced on the gate insulation layer (18).The source electrode (30) is formed from the contact well in the Vapour diffusion (CVD) Si02 layer on the surface, and the drain electrode (32) is formed on the bottom of the substrate (10)
申请公布号 DE3546745(C2) 申请公布日期 1994.06.30
申请号 DE19853546745 申请日期 1985.05.30
申请人 KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA 发明人 NAKAGAWA, AKIO, HIRATSUKA, KANAGAWA;OHASHI, HIROMICHI, YOKOHAMA;YAMAGUCHI, YOSHIHIRO, URAWA, SAITAMA;WATANABE, KIMINORI, KAWASAKI;THUKAKOSHI, THUNEO, ZUSHI, KANAGAWA
分类号 H01L29/06;H01L29/10;H01L29/739;(IPC1-7):H01L29/784;H01L29/72 主分类号 H01L29/06
代理机构 代理人
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