| 摘要 |
PURPOSE:To easily position an ultrasonic probe in a short time. CONSTITUTION:An ultrasonic microscope has an ultrasonic probe 1 telescopic in a Z-axis direction of a depth direction of a sample 10, comprises a light emitting element 5 for emitting a light from the side of the probe 1 and the sample 10, and a photoreceiver section 7 disposed oppositely to the element 5 through the probe 1 and the sample 10 and having a photoreceiver array 9 aligned in parallel with the Z-axis direction, and calculates a distance L between the probe 1 and the sample 1 based on light reception signals from the photoreceivers 9 of the section 7. |
