| 摘要 |
<p>PURPOSE:To freely control a protruding operation of a protruding needle and to obtain an optimum protruding operation adapted for a pellet by the control. CONSTITUTION:A protruding rod 4 is axially telescopically mounted coaxially with an adsorption stage 2 in the stage 2 formed with an adsorption table 2a provided with an adsorption hole 2c communicating with a negative pressure chamber 2b at an upper end. A protruding needle 5 is coaxially mounted at an end of the rod 4 at the table 2a side. On the other hand, a linear motor 7 is directly mounted at an opposite end via a connecting rod 6. The motor 7 is connected to a controller 9 having a setter 10 via a linear motor driver 8, and the motor 7 is controlled to be driven.</p> |
