发明名称 SHAPE SIMULATION METHOD
摘要 PURPOSE:To accurately estimate a change in a two-dimensional shape and a three-dimensional shape in a small computation time by a method wherein a time change in the shape of an object surface is expressed by a partial differential equation and an equal-value face in which a distribution function found by solving the partial differential equation becomes a prescribed value is extracted. CONSTITUTION:The shape of an object surface which is changed by working the object surface physically or chemically is expressed by the equal-value face S of a distribution function c(x, y, z, t) which uses three-dimensional coordinates (x), (y), (z) and the time (t) as variables. Thereby, a change in the shape of the object surface is estimated. At this time, the change in the shape of the object surface satisfies a partial differential equation by using a grade vector <Vc> for the distribution function (c) and a velocity vector <V> indicating the movement velocity of the object surface. The equal-value face S in which the distribution function (c) found by solving the partial differential equation becomes a prescribed value is extracted, and the shape after a working operation of the object surface is obtained.
申请公布号 JPH06176997(A) 申请公布日期 1994.06.24
申请号 JP19920323194 申请日期 1992.12.02
申请人 NIKON CORP 发明人 KOMATSU MASAYA
分类号 G01B11/16;H01L21/00;H01L21/027;H01L21/302;H01L21/3065;(IPC1-7):H01L21/027 主分类号 G01B11/16
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