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经营范围
发明名称
INSPECTION APPARATUS OF DEFECT
摘要
申请公布号
JPH06174654(A)
申请公布日期
1994.06.24
申请号
JP19920343600
申请日期
1992.12.01
申请人
NIKON CORP
发明人
KUSANO FUMITOMO
分类号
G01B11/30;G01N21/88;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):G01N21/88
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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