| 发明名称 |
INTERFEROMETRIC MEASUREMENT DEVICE |
| 摘要 |
Two input beams (10, 20) of an interferometric measurement device produced by integrated optics technology are widened to form two spread flat beams producing an interference pattern (30). Two sensors (15, 25) deliver two measurement signals, preferably in phase quadrature, representative of two points on the interference plane. |
| 申请公布号 |
WO9414028(A1) |
申请公布日期 |
1994.06.23 |
| 申请号 |
WO1993FR01194 |
申请日期 |
1993.12.06 |
| 申请人 |
MERLIN GERIN;KEVORKIAN, ANTOINE;DUPORT-SCHANEN, ISABELLE;BENECH, PIERRE |
发明人 |
KEVORKIAN, ANTOINE;DUPORT-SCHANEN, ISABELLE;BENECH, PIERRE |
| 分类号 |
G01B9/02;G02B6/12;G02B6/122 |
主分类号 |
G01B9/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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