| 摘要 |
<p>A microresonant structure includes a first fixed electrode (22) for receiving input, a second fixed electrode (23) for transmitting output, and a movable electrode (27) located between the first and second fixed electrodes. The electrodes are formed with interdigitated comb-like fingers (25, 27). The fixed electrodes are secured to and elevated above a silicon substrate. The movable electrode is supported above the substrate by flexible beams. A feedback loop (34) supplies output from the second fixed electrode back as input to the first fixed electrode to control the quality factor of the microresonant structure. The structure is useful as a high frequency filter.</p> |
