| 摘要 |
The particle detection system detects particles or flaws on the surface of an article. The system has a source of light directed against the surface of the article and a detector for detecting light scattered from the article and indicative of the presence of particles or flaws present on the article. The detector includes a light collector positioned for receiving and collecting light scattered from the surface of the article, a light splitter cooperating with the collector for dividing the collected light into first and second light collect components, first and second photodetectors positioned for receiving respectively first and second like light components, and an electrical circuit for combining the output signals from the first and second photodetectors to form a combined output signal with a higher signal-to-noise ratio than traditional systems. |
