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发明名称
摘要
申请公布号
JPH0623570(Y2)
申请公布日期
1994.06.22
申请号
JP19880109985U
申请日期
1988.08.24
申请人
发明人
分类号
H05H1/46;C23C16/50;C23C16/511;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):C23C16/50
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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