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经营范围
发明名称
摘要
申请公布号
JPH0648701(B2)
申请公布日期
1994.06.22
申请号
JP19930028684
申请日期
1993.01.25
申请人
发明人
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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