发明名称 SURFACE PLATE DRESSING DEVICE
摘要 PURPOSE:To prevent a thin and deep cutting groove from being formed on a working surface in a dressing device wherein a working surface of a surface plate is cut by a cutting tool. CONSTITUTION:A surface plate dressing device is provided with cutting tools 17, 18 for cutting working surfaces of surface plates 10, 11 in a surface polishing device, a moving means for moving the cutting tools 17, 18 in the radial and vertical directions and a setting means for setting the cutting depth, the cutting tools 17, 18 are provided with flat and horizontal cutting edges 17a, 18a, and the cutting edges are arranged in the rotational direction of the surface plates.
申请公布号 JPH06170720(A) 申请公布日期 1994.06.21
申请号 JP19920349838 申请日期 1992.12.02
申请人 SPEEDFAM CO LTD 发明人 IKEMOTO KIYOSHI
分类号 B24B53/017;B24B53/02 主分类号 B24B53/017
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