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发明名称
GAS REFINING APPARATUS
摘要
申请公布号
JPH06170105(A)
申请公布日期
1994.06.21
申请号
JP19920351310
申请日期
1992.12.07
申请人
TOKYO ELECTRON LTD
发明人
IWATA TERUO;IKEDA TORU
分类号
B01D8/00;F25J3/08;(IPC1-7):B01D8/00
主分类号
B01D8/00
代理机构
代理人
主权项
地址
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