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经营范围
发明名称
SURFACE WORKING METHOD
摘要
申请公布号
JPH06173043(A)
申请公布日期
1994.06.21
申请号
JP19920327766
申请日期
1992.12.08
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NAKAYAMA ICHIRO;TANNO MASUO;TAKADA YUSUKE
分类号
C23F4/00;C03C17/245;C03C17/42;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):C23F4/00
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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