发明名称 Method for producing semiconductor device with multilayer leads
摘要 A semiconductor device having multi-layered leads having a first lead portion including a polycrystalline silicon layer and a titanium silicide layer, and a second lead portion formed over the first lead portion and made up of a polycrystalline silicon layer. An intermediate insulating layer is provided between the first and second lead portions. The intermediate insulation layer and the underlying titanium silicide layer are provided with contact holes aligned with each other so as to allow the polycrystalline silicon of the second lead portion to be in direct contact with the polycrystalline silicon layer of the first lead portion without interposing therebetween the titanium silicide layer at the contact hole portion.
申请公布号 US5322815(A) 申请公布日期 1994.06.21
申请号 US19930083473 申请日期 1993.06.30
申请人 SEIKO EPSON CORPORATION 发明人 KONDO, TOSHIHIKO
分类号 H01L21/28;H01L21/3205;H01L21/768;H01L23/52;H01L23/522;H01L23/532;H01L29/78;(IPC1-7):H01L21/283 主分类号 H01L21/28
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