COATING LIQUID FOR SILICON OXIDE-BASED FILM FORMATION,申请号JP19920339448-传众专利搜索

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发明名称	COATING LIQUID FOR SILICON OXIDE-BASED FILM FORMATION
摘要
申请公布号	JPH06166511(A)	申请公布日期	1994.06.14
申请号	JP19920339448	申请日期	1992.11.27
申请人	TOKYO OHKA KOGYO CO LTD	发明人	NISHIMURA TOSHIHIRO
分类号	C01B33/12;H01L21/316;(IPC1-7):C01B33/12	主分类号	C01B33/12
代理机构		代理人
主权项
地址

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