PRODUCTION UNIT FOR HIGH-PURITY NITROGEN,申请号JP19920318143-传众专利搜索

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发明名称	PRODUCTION UNIT FOR HIGH-PURITY NITROGEN
摘要
申请公布号	JPH06166503(A)	申请公布日期	1994.06.14
申请号	JP19920318143	申请日期	1992.11.27
申请人	HITACHI LTD;HITACHI TECHNO ENG CO LTD	发明人	HAGA TETSURO;FUJIMORI KANJI;YAMAMOTO AKIO
分类号	C01B21/04;(IPC1-7):C01B21/04	主分类号	C01B21/04
代理机构		代理人
主权项
地址

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