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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06163547(A)
申请公布日期
1994.06.10
申请号
JP19920315215
申请日期
1992.11.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
TOBIMATSU HIROSHI
分类号
H01L21/60;H01L21/321;(IPC1-7):H01L21/321
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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