| 摘要 |
<p>PURPOSE:To control the fine clearance between two glasses by a simple constitution by detecting the clearance between a work and a mask by a gap sensor for detecting a metallic thin film provided to a work and a thin film metal of the work on the same plane as the mask. CONSTITUTION:A metallic thin film 2 is provided to a part of a work 1 on a surface facing mask 3. A substrate glass 1 which is a work is fixed to a frame, and a glass frame 4 is so held that the mask glass 3 and an electrostatic capacity type gap sensor 5 are flush with each other is mounted on a ball screw 8. The bass screw 8 rotates right and left by rotation of a motor 9, and moves the mask glass frame 4 to approach or leave the substrate glass 1. A clearance between the mask glass 3 and the substrate glass 1 is detected by measuring a distance with the metallic thin film 2 by the electrostatic capacity type gap sensor 5 held flush with the mask glass 3. It is necessary for a thickness of the metallic thin film 2 in an outer peripheral part of the substrate glass 1 to be enough small in comparison with the clearance.</p> |
