发明名称 |
METHODS AND APPARATUS FOR TREATING ELECTROLESS PLATING BATHS |
摘要 |
Apparatus and methods for removing formate ions from electroless metal plating baths employing formaldehyde as a reducing agent and typically comprising polyvalent anions as metal chelant and/or counterion. The apparatus and methods employ anion filtration to separate polyvalent anions from monovalent formate ions and ion exchange units to remove metal and metal chelant species from formate-containing streams. Preferred aspects of this invention provide apparatus and methods for removing formate from electroless copper plating baths. |
申请公布号 |
WO9412439(A1) |
申请公布日期 |
1994.06.09 |
申请号 |
WO1993US11020 |
申请日期 |
1993.11.12 |
申请人 |
MONSANTO COMPANY |
发明人 |
MARTYAK, NICHOLAS, MICHAEL;MONZYK, BRUCE, FRANCIS;CHIEN, HENRY, HUNG-YEH |
分类号 |
B01D61/02;B01D61/04;B01J45/00;C02F1/26;C02F1/44;C02F9/00;C23C18/16;(IPC1-7):C02F9/00;B01D61/58 |
主分类号 |
B01D61/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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