| 摘要 |
A portable scatterometer and/or an angular radiated light measurement instrument that uses a measurement head (10) which includes a double tapered fiber optic bundle (40) with a concave front face (41) to simultaneously collect partial or full hemispherically scattered light reflected from a point (43) on a surface illuminated by a depolarized, telescopically focused, laser diode source (21), the light rays being received by each fiber (44) normal to its face. The image of the collected light beams is minified and coupled by the fiber optic bundle (40) into an anti-blooming CID camera (130) with an x-y scanning area array which converts the light beams to electrical signals. In a unique real time, computer-controlled, data acquisition and reconstruction process, a frame grabber (175) and a unique algorithm are used to collect over 200,000 points of light, reconstruct the data into a 2D or 3D scatter profile and display the results, all within one second. |
