| 摘要 |
PURPOSE: To miniaturize a device and to raise measurement precision of angular speed by assigning a silicon acceleration sensor which rotates around an axis, and supplying a Coriolis force caused by rotation to a signal processing means through a light emitting element and an optical detecting element. CONSTITUTION: On an oblate disc 6 of silicon or ceramic, two acceleration sensors 1 and 2, a circuit 29 and a transmission element are assigned, and a actor 12 is driven to rotate the disc 6 in x direction around an axis line 3. The minute mechanical acceleration sensors 1 and 2 of silicon rotate in a circular track around the axis line 3, for receiving Coriolis force. The Coriolis force is firstly processed with the circuit 29, and the light from a transmission element 8 which uses a light emitting a diode is received with a reception element 9 which means, a photodiode, and it is transferred to a signal processing circuit outside thenisc 6 for obtaining an angular speed. As a power supply source to the circuit 29 and the transmission element 8, a rotary transformer 10 having high interference resistance is used. |
