| 摘要 |
PURPOSE:To correct the displacement of a specimen to a measuring reference position between two cameras, by forming image data with first and second cameras on the basis of voltage data per picture element of a specimen image existing in first and second measuring positions. CONSTITUTION:A specific part of a reference lead frame existing in a first measuring position is put as a linear edge 44 of an inner lead 42. A first reference position is indicated by a pointer 48a in a scale 46 attached on a slider. An MPU 28 drives an X-Y table 22 and moves the reference lead frame to a second measuring position when the first reference position is determined in sampling measurement. By the mechanical error of the X-Y table 22, the linear edge 44 of the inner lead 42 is biased by a distance D to right from a second measuring position. The MPU 28 finds the distance D by operating to store it in a memory 36. When a biased quantity is determined by this, the real width measurement of the inner lead is carried out. |
