发明名称 Low temperature ozonolysis of silicon and ceramic oxide precursor polymers to ceramic coatings
摘要 The present invention relates to a rapid, low-temperature method of forming a ceramic or ceramic-like coating on a substrate. It comprises coating the substrate with a solution comprising a solvent and one or more hydrolyzed or partially hydrolyzed preceramic silicon alkoxides and, optionally, a ceramic oxide precursor. The solvent is evaporated and a preceramic coating thereby deposited on the substrate. The coated substrate is heated to a temperature of between about 40 DEG to about 400 DEG C. in the presence of ozone to ceramify the ceramic or ceramic-like coating. Additional protective coatings may be applied onto the coating thus produced.
申请公布号 US5318857(A) 申请公布日期 1994.06.07
申请号 US19890432119 申请日期 1989.11.06
申请人 DOW CORNING CORPORATION 发明人 HALUSKA, LOREN A.
分类号 C04B41/49;H01L21/314;H01L21/316;H01L23/29;(IPC1-7):B22F7/00;B05D1/00 主分类号 C04B41/49
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