发明名称 |
Ozonolyse von Silicium und Vorläuferpolymeren keramischer Oxide zu keramischen Beschichtungen bei niedriger Temperatur |
摘要 |
The present invention relates to a rapid, low-temperature method of forming a ceramic or ceramic-like coating on a substrate. It comprises coating the substrate with a solution comprising a solvent and one or more hydrolyzed or partially hydrolyzed preceramic silicon alkoxides and, optionally, a ceramic oxide precursor. The solvent is evaporated and a preceramic coating thereby deposited on the substrate. The coated substrate is heated to a temperature of between about 40 DEG to about 400 DEG C. in the presence of ozone to ceramify the ceramic or ceramic-like coating. Additional protective coatings may be applied onto the coating thus produced. |
申请公布号 |
DE4035218(A1) |
申请公布日期 |
1994.06.01 |
申请号 |
DE19904035218 |
申请日期 |
1990.11.06 |
申请人 |
DOW CORNING CORP., MIDLAND, MICH. |
发明人 |
HALUSKA, LOREN ANDREW, MIDLAND, MICH. |
分类号 |
C04B41/49;H01L21/314;H01L21/316;H01L23/29;(IPC1-7):C23C26/00;C04B35/00;B05D1/30;C07F7/04;C07F7/18;C23C16/50 |
主分类号 |
C04B41/49 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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