| 摘要 |
PURPOSE:To provide a microwave discharge light source device capable of stabilizing the light emitting output. CONSTITUTION:A microwave discharge light source device is provided with a waveguide 2 for guiding the microwave oscillated by a microwave oscillator 1; a microwave resonant cavity body 3 connected to the waveguide 2 through a feed port 4; and a lamp vessel 6 provided in the microwave resonant cavity body 3 in which a discharge light emitting material excited by the microwave to discharge and emit light is received. Further, the device is provided with a dielectric bar 8 provided on the microwave resonant cavity body 3 in such a manner as to be capable of protruding and recessing to change the resonant wavelength of the microwave resonant cavity body 3 according to the protruding and recessing quantity; an optical sensor 13 for detecting the intensity of the light released from the lamp vessel 6; and a control device 14 for operating a pulse motor 12 on the basis of the detection signal of the optical sensor 13 to control the protruding and recessing quantity of the dielectric bar 8. |
