DRY ETCHING METHOD,申请号JP19920301396-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	DRY ETCHING METHOD
摘要
申请公布号	JPH06151382(A)	申请公布日期	1994.05.31
申请号	JP19920301396	申请日期	1992.11.11
申请人	TOSHIBA CORP;TOKYO ELECTRON LTD	发明人	HORI MASARU;OKANO HARUO;AOYAMA MICHINARI;ITO MASAO;HATTORI KEI;HIGUCHI FUMIHIKO;TAWARA YOSHIFUMI
分类号	C23F4/00;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/302	主分类号	C23F4/00
代理机构		代理人
主权项
地址

您可能感兴趣的专利

SPUTTERING TARGET AND TARGET ASSEMBLY

MANUFACTURING METHOD OF DECORATED PRODUCT

METALLIC MATERIAL HAVING EXCELLENT STRESS CORROSION CRACKING RESISTANCE

COATING MATERIAL FOR PLATINUM MATERIAL, PLATINUM MATERIAL COATED WITH SUCH COATING MATERIAL, AND GLASS MANUFACTURING APPARATUS

METHOD FOR PRODUCING SUBSTITUENT-ELIMINATED COMPOUND, METHOD FOR PRODUCING PIGMENT FINE PARTICLE, METHOD FOR PRODUCING PHTHALOCYANINE COMPOUND, AND METHOD FOR PRODUCING THIN FILM

RUBBER COMPOSITION FOR SIDE WALL AND TIRE HAVING SIDE WALL USING IT

METHOD FOR PRODUCING SILICA-CONTAINING NATURAL RUBBER COMPOSITION AND SILICA-CONTAINING NATURAL RUBBER COMPOSITION OBTAINED THEREBY

NEW POLYESTER AND POLYESTER COMPOSITION

RUBBER COMPOSITION FOR TIRE TREAD

RESIN COMPOSITION FOR PRODUCING DECORATIVE SHEET

NEAR-INFRARED ABSORBING PRESSURE-SENSITIVE ADHESIVE COMPOSITION AND MULTILAYER OPTICAL FILM

AQUEOUS DISPERSION OF POLYESTER RESIN AND ITS MANUFACTURING METHOD

MANUFACTURING METHOD OF MODIFIED POLYESTER

ADHESIVE FOR CONNECTING ELECTRODES

APPARATUS FOR PRODUCING CARBONIC ESTER AND METHOD FOR SEPARATING ALCOHOL AND CARBONIC ESTER

SUNSCREEN COSMETIC

ANTIAGING AGENT

METHOD OF MANUFACTURING THIN FILM OF POTASSIUM NIOBATE, SURFACE ACOUSTIC WAVE ELEMENT, FREQUENCY FILTER, FREQUENCY OSCILLATOR, ELECTRONIC APPLIANCE, AND METHOD OF MANUFACTURING THIN FILM OF KXNA1-XNB1-YTAYO3

METHOD FOR PRODUCING SILICON-CONTAINING TIN DIOXIDE POWDER

PH SENSITIVE MATRIX FORMULATION.