| 摘要 |
PURPOSE:To eliminate both the occurrence of particles and the positional displacement of a substrate by making it possible to transfer the substrate without coming into contact with a side end surface of the substrate. CONSTITUTION:A substrate support instrument is constituted by: a support section 8a which only comes into contact with, and supports, the rear surface of a rectangular substrate W on the outer periphery side thereof at a position lower than the substrate W; and a support drive mechanism that displaces the support section 8a between a substrate support position below the substrate W, where the support section 8a overlaps with the rectangular substrate W when vertically viewed, and a substrate non-support position which is horizontally away from the substrate support position. This makes it possible to transfer the rectangular substrate W without coming into contact with the peripheral end surface thereof. |
