CHARGED PARTICLE BEAM DRAWING EXPOSURE METHOD AND DEVICE,申请号JP19920325921-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM DRAWING EXPOSURE METHOD AND DEVICE
摘要
申请公布号	JPH06151284(A)	申请公布日期	1994.05.31
申请号	JP19920325921	申请日期	1992.11.11
申请人	TOSHIBA MACH CO LTD	发明人	KATAYAMA MITSUNOBU
分类号	H01L21/027;H01L21/82;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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