| 摘要 |
<p>PURPOSE:To provide a vacuum chuck which can attract an object, keeping cleanness, without damaging it. CONSTITUTION:This suction chuck is equipped with a chuck means 20, which chuck a semiconductor wafer to the suction face 12 by sucking air from the groove 13 at the suction face 12, and a porous resinous sheet material, which covers the suction face 12, being detachably attached to this chuck means 20.</p> |
